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Aerosol Generation and Charging Phenomena in Plasma Enhanced Chemical Vapor Deposition
Language: en
Pages: 584

Aerosol Generation and Charging Phenomena in Plasma Enhanced Chemical Vapor Deposition

Authors: Bruce Riley Forsyth
Categories:
Type: BOOK - Published: 1999 - Publisher:

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Chemical Vapor Deposition
Language: en
Pages: 292

Chemical Vapor Deposition

Authors: S Neralla
Categories: Science
Type: BOOK - Published: 2016-08-31 - Publisher: BoD – Books on Demand

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This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. C
Particle Generation in a Chemical Vapor Deposition/plasma-enhanced Chemical Vapor Deposition Interlayer Dielectric Tool
Language: en
Pages:

Particle Generation in a Chemical Vapor Deposition/plasma-enhanced Chemical Vapor Deposition Interlayer Dielectric Tool

Authors:
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Type: BOOK - Published: 1998 - Publisher:

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By Elaine D. Haberer.
Modeling and Control of Plasma Enhanced Chemical Vapor Deposition
Language: en
Pages: 17

Modeling and Control of Plasma Enhanced Chemical Vapor Deposition

Authors: Antonios Armaou
Categories: Chemical engineering
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Film Deposition by Plasma Techniques
Language: en
Pages: 224

Film Deposition by Plasma Techniques

Authors: Mitsuharu Konuma
Categories: Science
Type: BOOK - Published: 1992-04-30 - Publisher: Springer

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Properties of thin films depend strongly upon the deposition technique and conditions chosen. In order to achieve the desired film, optimum deposition condition
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