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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. Th

This book constitutes the refereed proceedings of the 6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, held in Chamonix, France, in February

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processi

Micro-assembly is a key enabling technology for cost effective manufacture of new generations of complex micro products. It is also a critical technology for re

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combi