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From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications
Language: en
Pages: 650
Authors: Marc J. Madou
Categories: TECHNOLOGY & ENGINEERING
Type: BOOK - Published: 2011 - Publisher: CRC Press

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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing
Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Language: en
Pages: 1983
Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2018-12-14 - Publisher: CRC Press

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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
From MEMS to Bio-MEMS and Bio-NEMS
Language: en
Pages: 652
Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2011-06-13 - Publisher: CRC Press

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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing
Mems for Biomedical Applications
Language: en
Pages: 511
Authors: Shekhar Bhansali
Categories: Technology & Engineering
Type: BOOK - Published: 2012-07-18 - Publisher: Elsevier

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The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applic
Advanced MEMS/NEMS Fabrication and Sensors
Language: en
Pages: 312
Authors: Zhuoqing Yang
Categories: Technology & Engineering
Type: BOOK - Published: 2021-10-12 - Publisher: Springer Nature

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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an