Download or read book Handbook of Surface and Nanometrology written by David J. Whitehouse and published by CRC Press. This book was released on 2002-12-01 with total page 982 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit