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Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for microm

Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller t

Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical e

This is a systematic presentation of modern optic methods for measurements based on interference in laser radiation. Most attention is given to the principles b