This book presents a collection of chapters written by experienced researchers in the fields of laser micro- and nano-scale processing for both surface and bulk
Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical e
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
This book covers the fundamental principles and physical phenomena behind laser-based fabrication and machining processes. It also gives an overview of their ex