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Reactive Sputter Deposition
Language: en
Pages: 584
Authors: Diederik Depla
Categories: Technology & Engineering
Type: BOOK - Published: 2008-06-24 - Publisher: Springer Science & Business Media

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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detai
Reactive Sputter Deposition
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Authors: Diederik Depla
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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detai
Magnetrons, Reactive Gases and Sputtering
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This handbook covers the fundamental aspects of reactive magnetron sputter deposition. This physical vapor deposition technique is used to grow compound thin fi
Advanced Strategies in Thin Film Engineering by Magnetron Sputtering
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Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin f
Handbook of Sputter Deposition Technology
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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputt