Download or read book Advances in Multiphysics Simulation and Experimental Testing of MEMS written by Attilio Frangi and published by World Scientific. This book was released on 2008 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.