Amvik eBook Solutions

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. Th

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processi

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. Th

This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materia