Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices
| Author | : Jiangang Du |
| Publisher | : |
| Total Pages | : 622 |
| Release | : 2007 |
| ISBN-10 | : OCLC:213501157 |
| ISBN-13 | : |
| Rating | : 4/5 (57 Downloads) |
Book Synopsis Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices by : Jiangang Du
Download or read book Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices written by Jiangang Du and published by . This book was released on 2007 with total page 622 pages. Available in PDF, EPUB and Kindle. Book excerpt:
