Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-
Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-
Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-
Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They w
The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and