MEMS Pressure Sensors: Fabrication and Process Optimization

MEMS Pressure Sensors: Fabrication and Process Optimization
Author :
Publisher : Lulu.com
Total Pages : 176
Release :
ISBN-10 : 9788461622078
ISBN-13 : 8461622073
Rating : 4/5 (78 Downloads)

Book Synopsis MEMS Pressure Sensors: Fabrication and Process Optimization by : Parvej Ahmad Alvi

Download or read book MEMS Pressure Sensors: Fabrication and Process Optimization written by Parvej Ahmad Alvi and published by Lulu.com. This book was released on 2014-07-14 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.


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