Microfabricated Silicon High Aspect Ratio Flexures for In-plane Motion
Author | : Christopher Guild Keller |
Publisher | : |
Total Pages | : 750 |
Release | : 1998 |
ISBN-10 | : UCAL:C3410055 |
ISBN-13 | : |
Rating | : 4/5 (55 Downloads) |
Book Synopsis Microfabricated Silicon High Aspect Ratio Flexures for In-plane Motion by : Christopher Guild Keller
Download or read book Microfabricated Silicon High Aspect Ratio Flexures for In-plane Motion written by Christopher Guild Keller and published by . This book was released on 1998 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt: