Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct fu
This book provides in-depth theoretical and practical information on recent advances in micro-manufacturing technologies and processes, covering such topics as
Several micro- and nanomanipulation techniques have emerged in recent decades thanks to advances in micro- and nanofabrication. For instance, the atomic force m
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition i
Engineers rely on Groover because of the book’s quantitative and engineering-oriented approach that provides more equations and numerical problem exercises. T