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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologie

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and t

This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines

As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is becoming a cri

Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser pri