(eBook/PDF) Ulsi Process Integration 6 Online

Language: en
Pages: 547

ULSI Process Integration 6

Authors: C. Claeys

Categories: Integrated circuits

Type: BOOK - Published: 2009-09 - Publisher: The Electrochemical Society

ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate sta

Language: en
Pages: 408

ULSI Process Integration

Authors: Cor L. Claeys

Categories: Computers

Type: BOOK - Published: 1999 - Publisher: The Electrochemical Society

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Language: en
Pages: 509

ULSI Process Integration 5

Authors: Cor L. Claeys

Categories: Integrated circuits

Type: BOOK - Published: 2007 - Publisher: The Electrochemical Society

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The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond