Download or read book Zone Plate Array Lithography in the Deep UV written by Ihsan Jahed Djomehri and published by . This book was released on 1998 with total page 47 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides a working knowledge for preliminary research into developing zone plate array lithography (ZPAL). ZPAL's goal is to utilize short wavelength radiation to produce the small feature sizes necessary for the realization of nanotechnology. Examines the operation of optical modules in a ZPAL system designed to operate in the deep UV.