Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors
Author | : Pinju Hsiang |
Publisher | : |
Total Pages | : 148 |
Release | : 1993 |
ISBN-10 | : OCLC:28239520 |
ISBN-13 | : |
Rating | : 4/5 (20 Downloads) |
Book Synopsis Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors by : Pinju Hsiang
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