Development of MEMS-based Piezoelectric Cantilever Arrays for Vibrational Energy Harvesting
Author | : |
Publisher | : |
Total Pages | : |
Release | : 2007 |
ISBN-10 | : OCLC:659871183 |
ISBN-13 | : |
Rating | : 4/5 (83 Downloads) |
Download or read book Development of MEMS-based Piezoelectric Cantilever Arrays for Vibrational Energy Harvesting written by and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The proposed test structures thus designed using the electromechanical LEM were fabricated using standard sol gel PZT and conventional surface and bulk micro processing techniques. The devices have been characterized with various frequency response measurements and the lumped element parameters were extracted from experiments. Finally, they were tested for energy harvesting by measuring the output voltage and power at resonance for varying resistive loads.