Download or read book High Rate Sputter Deposited Nb/sub 3/X Containing Oxygen. [Phases, Deposition Kinetics]. written by and published by . This book was released on 1976 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The sputtering technique was used to make the following superconductors, for which the phases and deposition kinetics are discussed: Nb/sub 3/Ge + GeO/sub 2/, Nb/sub 3/Al + Al/sub 2/O/sub 3/, Nb/sub 3/Sn + SnO/sub 2/, Nb/sub 3/Si + Al/sub 2/O/sub 3/, Nb/sub 3/Ge + Al/sub 2/O/sub 3/. (JFP).