Homogeneous Nucleation and Growth of Particles During Chemical Vapor Deposition of Silicon Oxide Films
Author | : Song-Moon Suh |
Publisher | : |
Total Pages | : 464 |
Release | : 2001 |
ISBN-10 | : MINN:31951P00754954T |
ISBN-13 | : |
Rating | : 4/5 (4T Downloads) |
Book Synopsis Homogeneous Nucleation and Growth of Particles During Chemical Vapor Deposition of Silicon Oxide Films by : Song-Moon Suh
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