III-V Heterostructure Devices on Silicon

III-V Heterostructure Devices on Silicon
Author :
Publisher : Pan Stanford
Total Pages : 550
Release :
ISBN-10 : 981466930X
ISBN-13 : 9789814669306
Rating : 4/5 (0X Downloads)

Book Synopsis III-V Heterostructure Devices on Silicon by : Shiban Tiku

Download or read book III-V Heterostructure Devices on Silicon written by Shiban Tiku and published by Pan Stanford. This book was released on 2015-12-31 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers semiconductor material basics, physics of devices used in semiconductor integrated circuit processing, and all the processing technologies used in III–V semiconductor fabrication. The content is chosen according to the needs of students as seen by a teacher and needs of practicing engineers dealing with processing issues as seen by an experienced process engineer. The book covers all aspects of the current state of the art of III–V processing with emphasis on heterojunction bipolar transistors, the volume leader technology, having grown due to the explosive growth of wireless technology. Its primary purpose is to discuss processing. Only necessary equations are derived and device behavior is discussed for the purpose of understanding device figures of merit and electrical parameters that engineers need to understand and control. All aspects of processing of active and passive devices from crystal growth to back side processing, including lithography, etching, and film deposition, are covered. New material systems based on GaN are taking a larger role on the development side. Although the etching chemistries, deposition materials, and the temperature regimes are different, similar principles apply. The text covers the most promising structures of these material systems and devices.


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