Micromachined Sensors and Actuators Based on Bent-beam Suspensions

Micromachined Sensors and Actuators Based on Bent-beam Suspensions
Author :
Publisher :
Total Pages : 176
Release :
ISBN-10 : WISC:89075864710
ISBN-13 :
Rating : 4/5 (10 Downloads)

Book Synopsis Micromachined Sensors and Actuators Based on Bent-beam Suspensions by : Long Que

Download or read book Micromachined Sensors and Actuators Based on Bent-beam Suspensions written by Long Que and published by . This book was released on 2000 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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