Download or read book Piezoelectric MEMS Resonator Characterization and Filter Design written by Joung-Mo Kang and published by . This book was released on 2004 with total page 100 pages. Available in PDF, EPUB and Kindle. Book excerpt: (Cont.) The filter analyses bring to light two major goals for the next stage of resonator development. First, an accurate tuning method must be devised as the resonator bar's small size makes manufacturing errors on the order of tens of nanometers significantly affect filter characteristics. Second, a lower impedance level for the resonator is desirable to allow robust interaction with integrated RF circuitry.