Download or read book The Development of a Prototype Zone-Plate-Array Lithography (ZPAL) System written by Amil Ashok Patel and published by . This book was released on 2004 with total page 77 pages. Available in PDF, EPUB and Kindle. Book excerpt: The research presented in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high-resolution, parallel patterning capabilities of the architecture. The experiment will require the integration of micromechanical spatial light modulators with an existing zone-plate-array testbed lithography tool. The system development requires an efficient data-delivery system to promote throughput and a thoughtful optical channel to optimize the lithographic performance of zone-plates. Lithography results obtained from the prototype will be presented along with basic performance characteristics.